ABXY的优点：
1、X、 Y采用气浮轴承，运行平稳
2、双驱步进轴具有被动减震模块
3、T轴：任意微转动，用于调平
4、Z轴：快速、精准的对焦运动
|
Travel |
Scan Axis |
350 mm,500 mm, |
|
Step Axis |
350 mm,500 mm |
|
|
Z Axis |
5 mm |
|
|
Tip/Tilt Axis |
±2 mrad |
|
|
Rz |
± 3° |
|
|
Drive System |
Linear Brushless Motor |
|
|
Resolution |
< 1 nm |
|
|
Accuracy |
±200 nm |
|
|
Repeatability（choose linear driver） |
±100 nm ( ±50 nm Optional ) |
|
|
XYZ Position Stability（Air On） |
20 nm |
|
|
Granite Bass Thickness |
250 mm |
|
|
Rated Payload(Maintaining Dynamic Specifications) |
5 kg |
|
|
Maximum Payload |
10 kg |
|
|
Maximum Velocity with Rated Payload |
Scan & Step Axis |
400 mm/s |
|
Peak Acceleration with Rated Payload |
Scan & Step Axis |
1G (10 m/s2) |
|
RMS Acceleration with Rated Load |
Scan & Step Axis |
0.5G (5 m/s2) |
|
Stiffness,First Natural Frequency with Rated Payload |
>100 Hz |
|
|
Pitch |
2 arc sec |
|
|
Roll |
2 arc sec |
|
|
Yaw |
2 arc sec |
|
|
XY straightness |
1 um |
|
|
XY Flatness |
1.2 um |
|
|
XY Orthogonality |
<2 arc sec |
|
|
Velocity ripple( sampled at 400mm/s) |
0.1 % |
|
|
MTBF |
20,000 hours |
|