Mechanical Specifications

560-300

560-400

560-500

 560-600

560-800

Travel

300 mm

400 mm

500 mm

600 mm

800 mm

Calibrated Accuracy

±1 μm

±1 μm

±1 μm

±1 μm

±1.5 μm

Resolution

1 nm – 10 nm

Repeatability (Bi-Directional)

±0.5 μm

Straightness & Flatness

±3 μm

±4 μm

±5 μm

±6 μm

±8 μm

Pitch & Yaw

10 arc sec

13 arc sec

15 arc sec

16.5 arc sec

19 arc sec

Maximum Speed

2 m/s   

Maximum Acceleration

30 m/s2

Maximum Force (Continuous)

500 N

Load Capacity 

Horizontal

150 kg

Side

150 kg

Moving Mass

25 kg

Stage Mass

90 kg

100 kg

110 kg

120 kg

140 kg

Material

Aluminum

MTBF

 20,000 hrs