VML280LM
无铁芯直线电机直驱
高质量长寿命机械导轨
侧面密封
低成本高性能
多规格多行程选择
应用:工业或科研,如计量、平板显示器制造等。
Mechanical Specifications |
280-300 |
280-400 |
280-500 |
280-600 |
280-800 |
|
Travel |
300 mm |
400 mm |
500 mm |
600 mm |
800 mm |
|
Calibrated Accuracy |
±1 μm |
±1 μm |
±1 μm |
±1 μm |
±1.5 μm |
|
Resolution |
1 nm – 10 nm |
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Repeatability (Bi-Directional) |
±0.5 μm |
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Straightness & Flatness |
±3 μm |
±4 μm |
±5 μm |
±6 μm |
±8 μm |
|
Pitch & Yaw |
10 arc sec |
12.5 arc sec |
15 arc sec |
16.5 arc sec |
19 arc sec |
|
Maximum Speed |
2 m/s |
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Maximum Acceleration |
30 m/s2 |
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Maximum Force (Continuous) |
260 N |
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Load Capacity |
Horizontal |
150 kg |
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Side |
150 kg |
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Moving Mass |
13 kg |
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Stage Mass |
50 kg |
55 kg |
60 kg |
65 kg |
75 kg |
|
Material |
Aluminum |
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MTBF |
20,000 hrs |