Mechanical Specifications

 225-100

 225-150

 225-200

 225-250

Travel

100 mm

150 mm

200 mm

250 mm

Calibrated Accuracy

±1 μm

±1 μm

±1 μm

±1 μm

Resolution

1 nm – 100 nm

1 nm – 100 nm

1 nm – 100 nm

1 nm – 100 nm

Repeatability (Bi-Directional)

±0.4 um

±0.4 um

±0.4 um

±0.4 um

Straightness & Flatness

±1.5 μm

±2 μm

±2.5 μm

±3 μm

Pitch & Yaw

5.5 arc sec

 6 arc sec

 8 arc sec

9 arc sec

Maximum Speed

2 m/s

Maximum Acceleration

30 m/s2

Maximum Force (Continuous)

150 N

Load Capacity 

Horizontal

100 kg

Side

100 kg

Moving Mass

8 kg

Stage Mass

24 kg

25.5 kg

27 kg

28.5 kg

Material

Aluminum

MTBF

 20,000 hrs

Mechanical Specifications

 225-300

 225-400

 225-500

225- 600

Travel

300 mm

400 mm

500 mm

600 mm

Calibrated Accuracy

±1 μm

±1 μm

±1 μm

±1 μm

Resolution

1 nm – 100 nm

Repeatability (Bi-Directional)

±0.4 um

±0.4 um

±0.4 um

±0.4 um

Straightness & Flatness

±3.5 μm

±4.5 μm

±5.5 μm

±6.5 μm

Pitch & Yaw

11 arc sec

 13 arc sec

15 arc sec

16.5 arc sec

Maximum Speed

2 m/s   

Maximum Acceleration

30 m/s2

Maximum Force (Continuous)

150 N

Load Capacity 

Horizontal

100 kg

Side

100 kg

Moving Mass

8 kg

Stage Mass

30 kg

33 kg

36 kg

39 kg

Material

Aluminum

MTBF

 20,000 hrs

Mechanical Specifications

 225-800

 225-1000

Travel

800 mm

1000 mm

Calibrated Accuracy

±1.5 µm

±1.5 µm

Resolution

1 nm – 10 nm

1 nm – 10 nm

Repeatability (Bi-Directional)

 ±0.5 µm

±0.5 µm

Straightness & Flatness

 ±8.5 µm

 ±10 µm

Pitch & Yaw

19 arc sec

23 arc sec

Maximum Speed

2 m/s

Maximum Acceleration

30 m/s2

Maximum Force (Continuous)

150 N

Load Capacity 

Horizontal

100 kg

Side

100 kg

Moving Mass

8 kg

Stage Mass

46 kg

52 kg

Material

Aluminum

MTBF

 20,000 hrs