Mechanical Specifications

190-100

190-150

190-200

190-250

Travel

100 mm

150 mm

200 mm

250 mm

Calibrated Accuracy

±1 µm

±1 µm

±1 µm

±1 µm

Resolution

 1 nm – 10 nm

  1 nm – 10 nm

  1 nm – 10 nm

  1 nm – 10 nm

Repeatability (Bi-Directional)

 ±0.4 µm

±0.4 µm

 ±0.4 µm

±0.4 µm

Straightness & Flatness

 ±1.5 µm

 ±2 µm

 ±2.5 µm

 ±3 µm

Pitch & Yaw

6 arc sec

7 arc sec

8.5 arc sec

9.5 arc sec

Maximum Speed

2 m/s

Maximum Acceleration

3 g

Maximum Force (Continuous)

100 N

Load Capacity 

Horizontal

60 kg

Side

60 kg

Moving Mass

4.5 kg

Stage Mass

14.5 kg

16 kg

17 kg

18 kg

Material

Aluminum

MTBF

 20,000 hrs

Mechanical Specifications

 190-300

  190-400

  190-500

190-600

Travel

300 mm

400 mm

500 mm

600 mm

Calibrated Accuracy

±1 µm

±1 µm

±1 µm

±1 µm

Resolution

 1 nm – 10 nm

1 nm – 10 nm

 1 nm – 10 nm

 1 nm – 10 nm

Repeatability (Bi-Directional)

 ±0.5 µm

 ±0.5 µm

 ±0.5 µm

±0.5 µm

Straightness & Flatness

 ±4 µm

 ±5 µm

 ±6 µm

 ±6.5 µm

Pitch & Yaw

11 arc sec

12.5 arc sec

15 arc sec

17 arc sec

Maximum Speed

2 m/s

Maximum Acceleration

30 m/s2

Maximum Force (Continuous)

100 N

Load Capacity 

Horizontal

60 kg

Side

60 kg

Moving Mass

4.5 kg

Stage Mass

20 kg

22 kg

25 kg

27 kg

Material

Aluminum

MTBF

 20,000 hrs

Mechanical Specifications

 190-800

 190-1000

Travel

800 mm

1000 mm

Calibrated Accuracy

±1.5 µm

±1.5 µm

Resolution

1 nm – 10 nm

1 nm – 10 nm

Repeatability (Bi-Directional)

 ±0.5 µm

±0.5 µm

Straightness & Flatness

 ±8 µm

 ±10 µm

Pitch & Yaw

19 arc sec

22.5 arc sec

Maximum Speed

2 m/s

Maximum Acceleration

30 m/s2

Maximum Force (Continuous)

100 N

Load Capacity 

Horizontal

60 kg

Side

60 kg

Moving Mass

4.5 kg

Stage Mass

32 kg

36 kg

Material

Aluminum

MTBF

 20,000 hrs